SI 500 D

  • BRAND: Sentech
  • DESCRIPTION: ICP plasma deposition system
  • Nation of Principal:Germany
    Product Application

    1. Exceptional high density plasma
    2. Planar ICP plasma source
    3. Outstanding properties of deposited layers
    4. Dynamic temperature control

    Related Link

It provides excellent performance for silane based deposition processes in Si and III-V semiconductor technology.


  • SI 500 PPD 1.PECVD with highly process flexibility on temperature & film 2.Vacuum loadlock with cleanline..