MEMSn&k
1. The spectral range of this system is 190-1000nm
2. The reflectence measurement Spot Size is 50um and the transmittance measurement Spot Size is 400um
3. The automated system is designed for handling 5” or 6” square masks.
4. The system provide non-destructive, real time measurement
5. The system provide high throughput measurements directly on the device