DESCRIPTION: Measured the lifetime, resistance, LBIC and Iron conceration of Si wafer, epi-layer, partially or fully processed wafer and compound semiconductor
Nation of Principal:Germany
Product Application:1. Lifetime
1. Offline mapping less than 5 minute.
2. wafer classification based on lifetime data
3. lifetime measurement at steady state (u-PCD also able)
4. Parameter autosetting, access to raw data.
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