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Laytec
http://www.laytec.de
Our EpiCurve® TT type of sensors allows simultaneous and wafer-selective temperature, reflectance and wafer bowing measurements with an outstanding resolution up to 0.3 km-1. Our EpiTT sensors are the first choice today for LED production world-wide and provide emissivity corrected temperature measurements based on the combination of pyrometry and reflectance measurements at two optimized wavelengths. EpiRAS® TT is still the most advanced multi-wafer in-situ sensor for cubic compound semiconductors. It is a unique tool for the R&D of GaAs- and InP-based opto-electronic devices |
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Bruker-Axs
http://www.bdal.com
X-Ray D8 Discover Diffraction system |
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SynMate
Laser Scriber、Splitter |
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SENTECH Instruments GmbH
http://www.sentech.com
1.Thin film measurement tools, including reflectometer, laser ellipsometer, spectroscopic ellipsometers, and automatic model for routine quality control.
2.Plasma processing tools, including ICP, RIE, PECVD & ICPECVD systems |
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Hanbell Drypump
http://www.hanbell.com
Drypump |
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Eco-Snow System
http://www.ecosnow.linde.com
Dry CO2 Cryogenic Clean System |
